XY Positioning Table Division : 0,01 mm,

Table linearity : +/- 0.01 mm. in 300 mm

Table perpendicularity : +/- 0.01 mm. in 100 mm

Table Flatness: : +/- 0.01 mm, in 200 mm

Table positioning Accuracy : +/- 0.01 in 200 mm

Z Servo motion : 200 mm , + /- 90 o rotation

Servo linearity : +/- 0.005 mm. in 200 mm

Servo positioning Accuracy : +/- 0.005 in 200 mm

Servo /Table perpendicularity : +/- 0.01 mm. in 100